Innovation-driven, intelligence-leading scientific research——Henan Yiyong Intelligent Technology Co., Ltd
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Customer Case of 1200℃ Intelligent Rail-Type CVD System

Intelligent sliding rail CVD system 1200℃ (4).jpg

A university nanomaterial laboratory applied the 1200℃ Intelligent Rail-Type CVD System for graphene, carbon nanotube and 2D semiconductor growth. The system adopts automatic electric rail push-pull to accurately move samples into heating zone or quickly pull to cooling chamber, realizing fast access and quenching without manual risk or temperature fluctuation.

In actual use, the system reaches max 1200℃ with dual-zone control accuracy ±1℃. Equipped with multi-channel MFC gas system and high vacuum ≤5×10⁻³Pa, it stably produces large-area single-layer graphene and aligned CNT arrays. Samples can cool down within 10 minutes to lock crystal structure and greatly improve film quality.

The system supports program control, auto gas, vacuum interlock and full safety protection. Customers achieved higher efficiency and better consistency, making it a key instrument for 2D materials and nanomaterial R&D.

Core Operating Parameters

Item

Specification

Max Temperature

1200℃

Temp Accuracy

±1℃

Rail Stroke

0–800mm

Ultimate Vacuum

≤5×10⁻³Pa

Cooling Speed

1200℃→100℃10min


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